X-ray Photoelectron Spectrometer (XPS)



X-ray photoelectron spectroscopy (XPS) is a surface-sensitive quantitative spectroscopic technique that measures the elemental composition at the parts per thousand range, empirical formula, chemical state and electronic state of the elements that exist within a material. XPS spectra are obtained by irradiating a material with a beam of X-rays while simultaneously measuring the kinetic energy and number of electrons that escape from the top 0 to 10 nm of the material being analyzed.


  • Multimode XPS imaging with 1 µm spatial resolution.
  • Electron only charge compensation
  • Quantitative determination of the element composition
  • Chemical state information; molecular environment of the element
  • Non-destructive analysis
  • Destructive depth profiles of inorganic materials for 100 s of nm
  • Imaging of lateral variations in surface composition at 15 m resolution